Valves for high purity applications / semiconductor industry
Overview
VU1000
This versatile and compact regulator is designed for high and low pressure applications.
The series is suitable for a wide range of corrosive and non-corrosive gases.
VU2000
The VU2000 series is designed for the control of high purity, corrosive, toxic, flammable and inert gases at high flow rates and low inlet pressures.
VU2500
The VU2500 series is designed for the control of high purity, corrosive, toxic, flammable and inert gases at high flow rates and low inlet pressures.
VU3000
The VU3000 series is a high-purity plant controller.
It is designed to regulate large volumes of gaseous media at low pressure.
This regulator has an extremely high flow capacity or Cv=5 / 10 / 15 / 20.
VUMicro
This regulator design is based on the process-proven Micro Series and incorporates a new poppet an seat allowing invreased flow capacity of 100 slpm.
VUMicroSM
The VU Micro SM Series provides stability and sensitivity for Surface Mount Systems an a ll the performance benefits to modular design.
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